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3D Vibration Measurements for Microsystems
Micro System Analyzer is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry.
The instrument is based on a novel 3D vibrometer setup enabling pm-resolution for both out-of-plane and in-plane motion. It has a frequency bandwidth of 25 MHz. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3D deflection shapes.
The optional integrated XY positioning table together with the sophisticated software enables an easy handling of the probe.
?Real-time measurement with high bandwidth up to 25 MHz
?Sub-pm displacement resolution for both Out-of-Plane and In-Plane motion
?Single-Point and Full-Field scanning measurements
?Small spot size of<4 μm for high lateral resolution
?Large stand-off distance of 38 mm
?Probe station compatible
Principal Configurations | MSA-100-3D Single-Point 3D Vibrometer | MSA-100-3DSV Scanning 3D Vibrometer | ||
Sensor head unit | Microscope optics for best lateral resolution with spot size<4 μm | |||
Front-End unit / | Installed in a system cabinet for 19" electrical equipment: | |||
Stａnd (optional) | Rigid stａnd for interfacing the sensor head unit to an optical table or breadboard, | |||
Prober compatibility | Compatible to manual, automatic and vacuum probestations | |||
xy Stage | Manual stage (optional) | A-PST-200P XY Precision Positioning Stage: | ||
Software | VibSoft-1004 Software Package for data acquisition and analysis | PSV Scanning Vibrometer Software for data acquisition and analysis | ||
Sensor Head Unit | ||||
Configuration | Single measurement beam, three direction sensitive detectors | |||
Laser source | DPSS, 532 nm, visible green laser beam | |||
Laser output power | <5 mW visible output power | |||
Laser safety class | Class 2M | |||
Stand-off distance | 36,7 mm | |||
Spot diameter | <4 µm | |||
Depth of focus | ±10 µm | |||
Weight | 12.5 kg | |||
Camera | Two integrated digital cameras for displaying measurement and large overview area | |||
Front-End Configurations | MSA-100-3D-H | MSA-100-3D-M | MSA-100-3D-V | |
fmax | 100 kHz | 2.5 MHz | 25 MHz | |
Number of ranges | 13 velocity ranges | 13 velocity ranges | 13 velocity ranges | |
vmax | 0.01 m/s … 10 m/s, range dependent | 0.001 m/s … 10 m/s, range dependent | 0.001 m/s … 10 m/s, range dependent | |
Velocity resolution, average value | 0.01 (µm/s)/√Hz … 0.02 (µm/s)/√Hz range dependent, frequency dependent | 0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent, frequency dependent | 0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent, frequency dependent | |
General Specifications | ||||
Power consumption | 100 VAC ... 240 VAC ±10%, 50/60 Hz; overall max. 825 W | |||
Environmental conditions | Operating temperature: +18 °C ... +28 °C (64.4 °F ... 82.4 °F); Relative humidity: max. 80%, non-condensing | |||
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