CCD electric ultra-high vacuum gate valve uses electric device to drive the stem, moving valve disc up and down to make the valve opened or closed. It is used to put through or cut off the airflow in vacuum pipeline. Applicable medium can be pure air and noncorrosive gases. With signal feedback device.
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主要技術性能 Main Technical Performance
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適用范圍：Applicability
105～1.3×10-7Pa
閥門漏率：Valve Leak Rate
≤1.3×10-7Pa.L/S.（DN≤200） ≤6.7×10-7Pa.L/S.（DN≥250）
適用溫度：Applicable Temperature
-30～+150℃
閥門開啟時閥板兩側的壓差： The differential pressure between the two sides of valve disc upon valve opening:
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